Ellipsometer

Key features:

• high precision
• superior spatial resolution (down to 1 µm)
• large area imaging ellipsometry up to several square centimeters
• single or multiple laser wavelengths
• motorized goniometer for angle-of-incidence (AoI) adjustment
• multiple Regions-of-Interest (ROI)
• Δ and Ψ mapping

For more information about the EP3-SE, go to http://nanofilm.de

Ellipsometer instructions

To be trained on this instrument, please contact Dr. Jing Wu.