Tescan FERA-3 Model GMH Focused Ion Beam Microscope

• Schottky Field Emission Electron Source
• SE, BSE detectors
• Integrated Plasma Ion Source (Xe) Focused Ion Beam (FIB)
• DrawBeam Basic Electron and Ion Beam Lithography Software
• Motorized Retractable Panchromatic Cathodoluminescence Detector (350 nm – 650 nm spectral range)
• MonoGIS Gas Injection System (Platinum)
• Standard EBSD with a NordlysNano high sensitivity camera and 3D EBSD capabilities
• Integrated Time-of-Flight Mass Spectrometer (TOF-SIMS)

Typical Applications:

• Fast FIB milling (etching) or FIB deposition of well-defined micro and nano structures
• Milling surface cross section to investigate the structure
• TOF-SIMS
• EBSD

The procedure for booking a training session for the FERA-FIB:

1. 1. Book a Pre-Training Meeting with both Dr. Sisi Xiang and Dr. Winson Kuo.
   2. Set up an iLab account with the MCF by user and PI.
   3. You will be contacted once your iLab account has been set up.
   4. Set up the time for actual training between 9:30 am to 12:30 pm; 2:00 pm to 5:00 pm, M-F with the Dr. Xiang.