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You are here: Home / Instruments / LYRA FIB-SEM

LYRA FIB-SEM

LYRA FIB-SEM

Tescan LYRA-3 Model GMH Focused Ion Beam Microscope

  • Schottky Field Emission Electron Source
  • SE, BSE detectors
  • STEM (dark and bright field imaging)
  • EBIC imagining system (electron beam induced conductivity)
  • Fully integrated Canion Ga LMIS Focused Ion Beam column
  • 5-Reservoir Gas Injection System: W deposition, Pt deposition, Insulator (SiOx) deposition, Enhanced Etching (H2O), Enhanced or selective etching of Si, SiO2, Si3N4, W (XeF2)
  • SmarAct 3-axis (XYZ) Piezo Nanomanipulator and controller
  • Beam Deceleration Mode for imaging at low voltage
  • Standard EDS Microanalysis System with X- MaxN 50

Typical Applications:

  • FIB milling (etching) or FIB deposition of well-defined micro and nano structures
  • Milling surface cross section to investigate the structure or composition
  • Preparation of TEM lamellae and in-situ lift out

The procedure for booking a training session for the LYRA-FIB:

    1. Book a Pre-Training Meeting with both Dr. Sisi Xiang and Dr. Winson Kuo.
    2. Set up an iLab account with the MCF by user and PI.
    3. You will be contacted once your iLab account has been set up.
    4. Set up the time for actual training between 9:30 am to 12:30 pm; 2:00 pm to 5:00 pm, M-F with the Dr. Xiang.

For training on the TOF-SIMS contact Dr. Yordanos Bisrat.

Lyra TEM Lamella Probe
Lyra TEM Lamella

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Instruments

PI 85 and PI 95 PicoIndenter

AFM-IR

Omicron XPS/UPS

Nanoindenter

LYRA FIB-SEM

Ellipsometer

Spectrofluorometer

UV-Vis-NIR Spectrophotometer

Electopolishers

Confocal Microscope

FE-SEM

Cameca Ion Microprobe

Dimension Icon AFM

LYRA FIB-SEM

Fume Hoods

FERA FIB-SEM

Electron Microprobe

FTIR Spectrometer

Differential Scanning Calorimeter (DSC)

Thermal Mechanical Analysis (TMA)

Dynamic Mechanical Analysis (DMA)

Hot Disc Thermal Conductivity Analyzer

Dielectric Spectrometer

Tensile Stages (500 N and 10 kN)

Prep Lab

Titan Themis 300 S/TEM

Optical Microscope

PIPS II

SEM and TEM Plasma Cleaners

Particle Size Analyzer

Surface Area Analyzer

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Materials Characterization Facility (MCF)

Frederick E. Giesecke Engineering Research Building
617 Research Parkway
College Station, TX 77843

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