The Titan Themis3 300 S/TEM is one of the most advanced electron microscopy platform providing high-resolution imaging with high performance analytical investigation capabilities at atomic level. It combines proven spherical aberration (Cs) –correctors to both image and probe forming optic system resulting in resolution limits below 1 Å for both modes for all high tensions between 60 kV and 300 kV. The high brightness electron gun (X-FEG) equipped with a monochromator to improve the energy resolution in combination with a high-sensitivity SDD X-ray spectrometer (Super-X) and a high-resolution post-column energy filter (GIF Quantum) creates a high performance analytical instrument perfectly suited for the nanoanalytical characterization of all kinds of materials and devices. Energy filtered TEM (EFTEM) imaging, high-resolution electron energy-loss spectroscopy (EELS) as well as energy-dispersive X-ray spectroscopy (EDXS) yield chemical, elemental as well as bonding information even down to the atomic scale.
Instrument Configurations:
Extreme Field Emission Gun ( X-FEG)
- Brightness ( ≥ 7*107 A/m2 sr V)
- Current ( ≥ 50nA before Monochromator)
- Current Stability (≤ 1% over 7 days)
- Spatial Coherency
- Temporal Coherency (Energy Resolution at 300KV without Monochromator ≤ 0.8eV)
Monochromator
- Energy Resolution at 300KV ≤ 0.2eV
CETCOR Image Cs Corrector (FOR TEM)
DCOR Probe Cs Corrector (FOR STEM): Correct high order aberrations (3rd, 4th, and 5th order aberrations)
3 Lens Condenser
- Large parallel illumination range in TEM (nm to µm range)
- Large convergence angle range in STEM
Super-Twin Objective Lens
- Wide Pole Piece Gap (5mm)
- Large sample tilting range (±70)
Super-X EDS Detectors
- 4 Silicon Drift Detectors / Windowless
- Large Solid Angle ( 0.9 srad)
- High Throughput rate ( >240kcps)
- Energy Resolution at Mn Kα < 128eV
- Dwell Times per Pixel < 10µs
CETA Camera: 4K*4K CMOS Camera
Gatan Image Filter Quantum ERS
- Ultrascan 2K* 2K CCD
- Large EELS detection range (2000eV)
Holders:
Single tile holder: morphology observation, EDS acquisition (-30° ~ + 30°)
Double-tilt (low background): morphology, detailed crystalline material study, EDS acquisition (-30° ~ + 30°)
Tomography (Fishione MODEL 2020): similar to single-tilt holder but with lower holder profile allowing high alpha tilt angle (-70°+70°)
In-situ holder (Bruker/Hysitron PI 95): Compression, Indentation and Push to Pull Tensile Test.
For training on this instrument, please contract Dr. Sisi Xiang.
Titan Images:
