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PIPS II

Precision Ion Polishing System II (Model 695)

The precision ion polishing system (Gatan PIPS™) II is an Ar+ ion mill system which provide thinning, polishing as well as cleaning for transmission electron microscope (TEM) sample preparation.

The PIPS II system is incorporated with the X, Y positioning stage for precise centering of the milling target with cold stage. It also includes a 10” touchscreen for ease of use and increased control and reproducibility of the milling process. The digital zoom microscope monitors the polishing process in real time, plus the color images can be stored in DigitalMicrograph® (DM) software for review and analysis while the sample is in the TEM.

Benefits

  • WhisperLok with X, Y stage: Ability to center the region of interest for re-polish
  • Low energy focusing penning ion guns: Improved low energy milling for focused ion beaam (FIB) prepared samples
  • Variable energy from 0.1 – 8.0 kV: Improved low energy milling for reduction in amorphous layer for corrected TEMs
  • LN2 specimen cooling: Eliminates artifacts
  • 10” color touchscreen control: Simple but full control from the graphical user interface (GUI)
  • Digital zoom microscope: Operates in real time while milling
  • Color image storage in DM software: Ability to store and use optical images with the TEM and EELS data in the same format

Applications

  • Semiconductor
  • Metals (oxide, alloy)
  • Ceramics

Specifications

Ion source

Ion guns          Two penning ion guns with low energy focusing electrodes

Milling angle (°)         +10 to -10

Each gun independently adjustable

Ion beam energy (kV) 0.1 – 8.0

Ion current density peak         10 (mA/cm2)

Beam alignment         Precision beam alignment using fluorescent screen

Beam diameter           Adjustable using gas flow controller or discharge voltage

Specimen stage

Sample size (mm)        3 or 2.3

Rotation (rpm)            1 – 6

Beam modulation       Single or double  with adjustable range

X, Y translation (mm) ±0.5

Viewing

Digital zoom microscope and DM storage

Dry pumping system   Two-stage diaphragm pump backing an 80 L/s turbo drag pump

Digital Pressure (torr) Base Operating 5 x 10-6, 8 x 10-5

Vacuum gauge Cold cathode type for the main chamber, solid-state for backing pump

Specimen airlock        WhisperLok, specimen exchange time <1 min

 

To be trained on this instrument, please contact Dr. Sisi Xiang.